設(shè)備名稱

Description

型號

Model

主要技術(shù)內(nèi)容

Specification

主要用途

Usage

其它

Other

雙室蒸發(fā)系統(tǒng)

Evaporates

equipments

ZF-450

極限真空：2x10^-4Pa

Ultimate cacuuum:2x10^-4Pa

蒸發(fā)室：φ450

Evaporates chamber:φ450

樣品：100x100

Sample size:100x100

蒸發(fā)舟：8個

Boat of evaporate：8

等離子清洗功率：RF 300W

Plasma clean power：RF 300W

配氣系統(tǒng)：1路流量控制

Gas flow  system:1-MFC,

flow control

有機發(fā)光器件研制

The research and the manufacturing

 of the machine piece that organic 

material give our light.